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[Scan & Motion Systems] Polygon Scanner

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작성자 lvitech 댓글 0건 조회 40회 작성일 19-10-30 18:31

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polygonscanner2.gif

▶ LSE 170

Mode Standard High NA
Wavelength 355~375 515-532 1030-1070 355~375 515-532 1030-1070
FWHM 9µm  13µm 26µm  5µm 7µm 14µm
1/e2 15µm 22µm 44µm 8µm 12µm 24µm
Input Beam Diameter 6mm
Scan Width 170mm
Position Accuracy ±10µm or 1µm
Line Straightness ±10µm or 1µm
Spot Repeatability <3µm

Mode Standard High NA
Wavelength 355~375 515-532 1030-1070 355~375 515-532 1030-1070
Scan Speed 100~400 Lines per second
Moving
Spot Speed
25-100meters per second
Minimum Pulse Width 400 fs
Maximum Pulse Energy 100µJ



▶ LSE 300

Mode Standard High NA
Wavelength 355~375 515-532 1030-1070 355~375 515-532 1030-1070
FWHM 9µm  13µm 26µm  5µm 7µm 14µm
1/e2 15µm 22µm 44µm 8µm 12µm 24µm
Input Beam Diameter 11 21
Scan Width Scan Field : 300mm 가능
Position Accuracy ±10µm or 1µm
Line Straightness ±15µm or 1µm
Spot Repeatability <3µm


Mode Standard High NA
Input Beam 355~375 515-532 1030-1070 355~375 515-532 1030-1070
Scan Speed 56-224lines per second
Moving Spot Speed 25-100meters per second
Minimum Pulse  Width 400 fs
Maximum Pulse Energy 100µJ




Applications :
• Display: Touch Screen의 박막 Patterning 
• Sola Cell: Flexible한 전기장치의 R2R가공
• Semicon: Microdrilling, Grooving 또는 Wafers Dicing
• Automotive: 박막 ablation 및 미세 가공
• Medical: 유리, 세라믹, 플라스틱 미세가공
• Additive manufacturing: 대면적 노광 공정
• Sensors: 높은 정밀도를 갖는 제품 가공
• 대면적 Mapping
• Laser Printing 

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