Long-term
drift over a period of 8 hours: < 0.45 mrad
***.
*
F-Theta-objective f-160.
** Single-stroke font with 1 mm height.
*** After Warm-up. Variations of environmental
temperature < 1¡ÆC. Drift is specified per
axis.
¡á
Lens Information
Laser
CO2
Wavelength
(nm)
10,600
10,600
10,600
Objective
(f in mm)
f
= 100
f
= 200
f
= 300
Typical
Field Size (mm)
70
x 70
140
x 140
210
x 210
Spot
Diameter TEM00 (¥ìm)
Aperture 15, 30 mm
~180/-
~270/-
~375/-
Working
Distance (mm)*
Aperture 15, 30 mm
109/88
91/-
209/190
193/-
309/288
292/-
Resolution
(¥ìm)
2
4
6
Temperature
Drift (max., ¥ìm/¡ÆC)**
9
19
28
*
Distance between edge of scan head and working
surface.
This distance will vary with laser divergence
and lens tolerance.
** Maximum temperature induced gain drift: 0.01%/¡ÆC;
maximum offset drift: 25¥ìR /¡ÆC
Drift is specified per axis.
